SPIE Proceedings [SPIE Sixth International Symposium on Precision Engineering Measurements and Instrumentation - Hangzhou, China (Sunday 8 August 2010)] Sixth International Symposium on Precision Engineering Measurements and Instrumentation - High-temperature microelectromechanical pressure sensors based on a SOI heterostructure for an electronic automatic aircraft engine control system
Sokolov, Leonid V.Volume:
7544
Year:
2010
Language:
english
DOI:
10.1117/12.885688
File:
PDF, 2.60 MB
english, 2010