SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2011 - Beijing, China (Tuesday 24 May 2011)] International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies - Properties comparison of plasma-deposited SiOx and SiNx films applied to supporting films in an infrared scene projector device

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