SPIE Proceedings [SPIE 1989 Microlithography Conferences - San Jose, CA (Monday 27 February 1989)] Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies VIII - Fabrication of 1-Mbit DRAMs By Using X-Ray Lithography
Yoshioka, Nobuyuki, Ishio, Noriaki, Fujiwara, Nobuo, Eimori, Takahisa, Watakabe, Yaichiro, Kodama, Kenichi, Miyachi, Takashi, Izawa, Hisao, Yanof, Arnold W.Volume:
1089
Year:
1989
Language:
english
DOI:
10.1117/12.968529
File:
PDF, 8.73 MB
english, 1989