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Innovative Line Segment Fabrication Model of Near Field Photolithography and Simulation Analysis
Yang, Ching-BeenVolume:
8
Language:
english
Journal:
Journal of Computational and Theoretical Nanoscience
DOI:
10.1166/jctn.2011.1891
Date:
September, 2011
File:
PDF, 1.40 MB
english, 2011