Nanopatterning on Silicon Wafers Using AFM-Based Lithography—for Solar Cells
Lu, Hui-Hsin, Lin, Chii-Wann, Hsiao, Tzu-Chien, Lee, Chih-Kung, Hsu, Su-MingVolume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.si08
Date:
March, 2009
File:
PDF, 1.72 MB
english, 2009