Future directions of positron annihilation spectroscopy in...

Future directions of positron annihilation spectroscopy in low-k dielectric films

D. W. Gidley, R. S. Vallery, M. Liu, H.-G. Peng
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Volume:
4
Year:
2007
Language:
english
Pages:
8
DOI:
10.1002/pssc.200675761
File:
PDF, 1.61 MB
english, 2007
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