Annealing studies of high Ge composition Si/SiGe...

Zeitschrift für Kristallographie 2004 / 01 Vol. 219; Iss. 4

Annealing studies of high Ge composition Si/SiGe multilayers

Meduňa, Mojmír, Novák, Jiří, Bauer, Günther, Holý, Václav, Falub, Claudiu Valentin, Tsujino, Soichiro, Müller, Elisabeth, Grützmacher, Detlev, Campidelli, Yves, Kermarrec, Olivier, Bensahel, Daniel
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Volume:
219
Language:
english
Journal:
Zeitschrift für Kristallographie - Crystalline Materials
DOI:
10.1524/zkri.219.4.195.30440
Date:
January, 2004
File:
PDF, 1016 KB
english, 2004
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