Spectroscopic ellipsometry of materials for infrared micro-device fabrication
W. R. Folks, J. Ginn, D. Shelton, J. Tharp, G. BoremanVolume:
5
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssc.200777748
File:
PDF, 189 KB
english, 2008