Spectroscopic ellipsometry and reflectometry of...

Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies

Ivan Ohlídal, David Necas, Daniel Franta
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Volume:
5
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssc.200777769
File:
PDF, 260 KB
english, 2008
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