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Comparative investigation of the Si/SiO2 interface layer containing SiC crystallites using spectroscopic ellipsometry, ion beam analysis and XPS
T. Lohner, A. Pongrácz, N. Q. Khánh, O. H. Krafcsik, K. V. Josepovits, P. DeákVolume:
5
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssc.200777791
File:
PDF, 377 KB
english, 2008