41lanthanum-based dielectric films analyzed by spectroscopic ellipsometry, X-ray reflectometry and X-ray photoelectron spectroscopy
V. Edon, M. Gaillet, M.C. Hugon, C. Eypert, O. Durand, C. CardinaudVolume:
5
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssc.200777839
File:
PDF, 398 KB
english, 2008