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Characterization of silicide stacks by combination of spectroscopic ellipsometry and reflectometry
O. Fursenko, D. Bolze, I. Costina, P. Zaumseil, T. Huelsmann, J. Niess, W. LerchVolume:
5
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssc.200777879
File:
PDF, 422 KB
english, 2008