Characterization of silicide stacks by combination of...

Characterization of silicide stacks by combination of spectroscopic ellipsometry and reflectometry

O. Fursenko, D. Bolze, I. Costina, P. Zaumseil, T. Huelsmann, J. Niess, W. Lerch
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Volume:
5
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssc.200777879
File:
PDF, 422 KB
english, 2008
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