![](/img/cover-not-exists.png)
Piezoelectric actuation of all-nitride MEMS
K. Tonisch, C. Buchheim, F. Niebelschütz, M. Donahue, R. Goldhahn, V. Cimalla, O. AmbacherVolume:
5
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssc.200778423
File:
PDF, 502 KB
english, 2008