![](/img/cover-not-exists.png)
AlGaN/GaN-based MEMS with two-dimensional electron gas for novel sensor applications
F. Niebelschütz, V. Cimalla, K. Tonisch, Ch. Haupt, K. Brückner, R. Stephan, M. Hein, O. AmbacherVolume:
5
Year:
2008
Language:
english
Pages:
3
DOI:
10.1002/pssc.200778424
File:
PDF, 180 KB
english, 2008