Investigation of top gate electrode options for high-k gate dielectric MOS capacitors
D. C. Moschou, E. Verrelli, D. N. Kouvatsos, P. Normand, D. Tsoukalas, A. Speliotis, P. Bayiati, D. NiarchosVolume:
5
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/pssc.200780147
File:
PDF, 176 KB
english, 2008