RF MEMS status and perspectives

Fabio Coccetti, David Peyrou, Mahmoud Al Ahmad, Vincent Puyal, Patrick Pons, Hervé Aubert, Alex Muller, Mircea Dragoman, Robert Plana

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Volume:

Year:

2008

Language:

english

Pages:

DOI:

10.1002/pssc.200780189

File:

PDF, 399 KB

english, 2008

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