Dominant ion species in VHF SiH4/H2 plasma

physica status solidi (c) 2010 Vol. 7; Iss. 3-4

Dominant ion species in VHF SiH4/H2 plasma

Yasuhiro Yamauchi, Tomoyoshi Baba, Tsukasa Yamane, Yoshiaki Takeuchi, Hiromu Takatsuka, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai
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Volume:
7
Year:
2010
Language:
english
Pages:
1
DOI:
10.1002/pssc.200982661
File:
PDF, 144 KB
english, 2010
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