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Preparations of P- and N-doped hydrogenated microcrystalline cubic silicon carbide films by VHF plasma enhanced chemical vapor deposition method for Si thin film solar cells
Norimitsu Yoshida, Sho Terazawa, Atsuteru Takeuchi, Nobutaka Yoneyama, Tomo-o Morino, Zhao Jun, Hironori Natsuhara, Shuichi NonomuraVolume:
7
Year:
2010
Language:
english
Pages:
1
DOI:
10.1002/pssc.200982732
File:
PDF, 98 KB
english, 2010