Microcrystalline silicon films and solar cells deposited at high rate by Matrix Distributed Electron Cyclotron Resonance (MDECR) plasma
Laurent Kroely, Sanjay K. Ram, Pavel Bulkin, Pere Roca i CabarrocasVolume:
7
Year:
2010
Language:
english
Pages:
1
DOI:
10.1002/pssc.200982789
File:
PDF, 261 KB
english, 2010