Plasma emission diagnostics during fast deposition of microcrystalline silicon thin films in matrix distributed electron cyclotron resonance plasma CVD system
Sanjay K. Ram, Laurent Kroely, Samir Kasouit, Pavel Bulkin, Pere Roca i CabarrocasVolume:
7
Year:
2010
Language:
english
Pages:
1
DOI:
10.1002/pssc.200982817
File:
PDF, 800 KB
english, 2010