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a-SiC:H films deposited by PECVD for MEMS applications
Marcus V. Pelegrini, Gustavo P. Rehder, Inés PereyraVolume:
7
Year:
2010
Language:
english
Pages:
1
DOI:
10.1002/pssc.200982888
File:
PDF, 164 KB
english, 2010