Hollow core ARROW waveguides fabricated with SiOxNy films deposited at low temperatures
Alexandre H. Gollub, Daniel O. Carvalho, Thiago C. Paiva, Marco I. AlayoVolume:
7
Year:
2010
Language:
english
Pages:
1
DOI:
10.1002/pssc.200982889
File:
PDF, 524 KB
english, 2010