Deep-UV transparent bulk single-crystalline AlN substrates

Deep-UV transparent bulk single-crystalline AlN substrates

Matthias Bickermann, Boris M. Epelbaum, Octavian Filip, Paul Heimann, Martin Feneberg, Shunro Nagata, Albrecht Winnacker
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Volume:
7
Year:
2010
Language:
english
Pages:
3
DOI:
10.1002/pssc.200983422
File:
PDF, 222 KB
english, 2010
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