Effect of the substrate temperature on the properties of the RF sputtered TiO2 thin films
I. Ben Mbarek, F. Chaabouni, M. Selmi, M. Abaab, B. RezigVolume:
7
Year:
2010
Language:
english
Pages:
5
DOI:
10.1002/pssc.200983739
File:
PDF, 528 KB
english, 2010