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Structure of the near-surface layer of Cz Si wafers subjected to low-temperature low-energy ion-beam treatment
Alexander Fedotov, Inna Ivashkevich, Svetlana Kobeleva, Olga Korolik, Alexander Mazanik, Nikola Stas'kov, Sergey TurishchevVolume:
8
Year:
2011
Language:
english
Pages:
4
DOI:
10.1002/pssc.201000331
File:
PDF, 172 KB
english, 2011