Investigation of current-voltage characteristics of p-type silicon during electrochemical anodization and application to doping profiling
Ahmed Gharbi, Boudjemaa Remaki, Aomar Halimaoui, Daniel Bensahel, Abdelkader SouifiVolume:
8
Year:
2011
Language:
english
Pages:
4
DOI:
10.1002/pssc.201000343
File:
PDF, 487 KB
english, 2011