Chemical characterization of SiC and Si3N4 precipitates in multicrystalline silicon by NIR microscopy and ToF-SIMS
Susanne Richter, Kai Kaufmann, Christian HagendorfVolume:
8
Year:
2011
Language:
english
Pages:
4
DOI:
10.1002/pssc.201000346
File:
PDF, 480 KB
english, 2011