Chemical characterization of SiC and Si3N4 precipitates in...

Chemical characterization of SiC and Si3N4 precipitates in multicrystalline silicon by NIR microscopy and ToF-SIMS

Susanne Richter, Kai Kaufmann, Christian Hagendorf
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Volume:
8
Year:
2011
Language:
english
Pages:
4
DOI:
10.1002/pssc.201000346
File:
PDF, 480 KB
english, 2011
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