Etch-induced damage characteristics of n-GaN surfaces by...

Etch-induced damage characteristics of n-GaN surfaces by capacitively coupled radio frequency He and Ar plasmas

Retsuo Kawakami, Takeshi Inaoka, Kikuo Tominaga, Masahito Niibe, Takashi Mukai, Atsushi Takeichi, Toshiaki Fukudome
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Volume:
8
Year:
2011
Language:
english
Pages:
3
DOI:
10.1002/pssc.201000400
File:
PDF, 292 KB
english, 2011
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