Patterning of sapphire/GaN substrates

physica status solidi (c) 2011 Vol. 8; Iss. 5

Patterning of sapphire/GaN substrates

S. Suihkonen, M. Ali, O. Svensk, S. Sintonen, M. Sopanen, H. Lipsanen, P. T. Törmä, V. Nevedomsky, N. Bert
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Volume:
8
Year:
2011
Language:
english
Pages:
4
DOI:
10.1002/pssc.201000903
File:
PDF, 165 KB
english, 2011
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