Aluminum nitride homoepitaxial growth on polar and...

physica status solidi (c) 2011 Vol. 8; Iss. 7-8

Aluminum nitride homoepitaxial growth on polar and non-polar AlN PVT substrates by high temperature CVD (HTCVD)

Arnaud Claudel, Yann Chowanek, Elisabeth Blanquet, Didier Chaussende, Raphaël Boichot, Alexandre Crisci, G. Berthomé, Hugues Mank, Sorana Luca, Didier Pique, Michel Pons
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Volume:
8
Year:
2011
Language:
english
Pages:
3
DOI:
10.1002/pssc.201000940
File:
PDF, 391 KB
english, 2011
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