Electrical and EDX-analysis of CF4 and Ar plasma treated...

physica status solidi (c) 2011 Vol. 8; Iss. 7-8

Electrical and EDX-analysis of CF4 and Ar plasma treated AlGaN/GaN HEMTs

P. Kotara, O. Hilt, H. Kirmse, J. Würfl, W. Neumann, G. Tränkle
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Volume:
8
Year:
2011
Language:
english
Pages:
3
DOI:
10.1002/pssc.201001066
File:
PDF, 395 KB
english, 2011
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