In-situ deposited SiNx nanomask for crystal quality...

physica status solidi (c) 2011 Vol. 8; Iss. 7-8

In-situ deposited SiNx nanomask for crystal quality improvement in AlGaN

Kamran Forghani, Mohammadreza Gharavipour, Martin Klein, Ferdinand Scholz, Oliver Klein, Ute Kaiser, Martin Feneberg, Benjamin Neuschl, Klaus Thonke
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Volume:
8
Year:
2011
Language:
english
Pages:
3
DOI:
10.1002/pssc.201001074
File:
PDF, 394 KB
english, 2011
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