Nano-beam electron diffraction evaluation of strain behaviour in nano-scale patterned strained silicon-on-insulator
Angelika Hähnel, Manfred Reiche, Oussama Moutanabbir, Horst Blumtritt, Holm Geisler, Jan Hoentschel, Hans-Jürgen EngelmannVolume:
8
Year:
2011
Language:
english
Pages:
6
DOI:
10.1002/pssc.201084007
File:
PDF, 678 KB
english, 2011