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Masking photochromic films for nanolithography technology
Anton Ayt, Valery Barachevsky, Olga Kobeleva, Tatyana Valova, Alexander Gorelik, Michail Krayushkin, Maksim Komlenok, Vitaly KononenkoVolume:
8
Year:
2011
Language:
english
Pages:
4
DOI:
10.1002/pssc.201084073
File:
PDF, 346 KB
english, 2011