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Limitations of Cl2/O2-based ICP-RIE of deep holes for planar photonic crystals in InP
Peter Kaspar, Christopher Fougner, Roman Kappeler, Heinz JäckelVolume:
9
Year:
2012
Language:
english
Pages:
4
DOI:
10.1002/pssc.201100223
File:
PDF, 257 KB
english, 2012