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Evaluation of AlN material properties through vibration analysis of thin membranes
Vadim Lebedev, Fabian Knöbber, Nicola Heidrich, Ram Ekwal Sah, Wilfried Pletschen, Volker Cimalla, Oliver AmbacherVolume:
9
Year:
2012
Language:
english
Pages:
4
DOI:
10.1002/pssc.201100259
File:
PDF, 330 KB
english, 2012