A new approach of planar oxidation of buried AlxGa1–xAs/GaAs epitaxial structures for optical and electrical confinement applications
F. Chouchane, J. B. Doucet, A. Arnoult, G. Lacoste, C. Fontaine, G. AlmuneauVolume:
9
Year:
2012
Language:
english
Pages:
4
DOI:
10.1002/pssc.201100264
File:
PDF, 202 KB
english, 2012