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[IEEE International Electron Devices and Materials Symposium - Hsinchu, Taiwan (12-15 July, 1994)] International Electron Devices and Materials Symposium - Interdisciplinary characterization of sandwiched SiGe thin layers grown by molecular beam epitaxy
Feng, Z.C., Arbet-Engels, V., Karunasiri, R.P.G., Wang, K.L., Watta, F., Lee, K.K, Wee, A.T.S., Hng, H.H., Williams, K.P.J.Year:
1994
Language:
english
DOI:
10.1109/edms.1994.863768
File:
PDF, 319 KB
english, 1994