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[IEEE 28th European Microwave Conference, 1998 - Amsterdam, Netherlands (1998.10.4-1998.10.6)] 28th European Microwave Conference, 1998 - Three-Dimensional MMIC Interconnect Process using Photosensitive BCB and STO Capacitors
Inoue, Koh, Kamogawa, Kenji, Nishikawa, Kenjiro, Ikuta, Kenji, Onodera, Kiyomitsu, Hirano, MakotoYear:
1998
Language:
english
DOI:
10.1109/euma.1998.338062
File:
PDF, 5.63 MB
english, 1998