[IEEE 2015 International Conference on Industrial Informatics - Computing Technology, Intelligent Technology, Industrial Information Integration (ICIICII) - Wuhan, China (2015.12.3-2015.12.4)] 2015 International Conference on Industrial Informatics - Computing Technology, Intelligent Technology, Industrial Information Integration - Multi-objective Fault Monitoring for Semiconductor Manufacturing Process with DEWMA Run-to-Run Controller
Wang, Yan, Zheng, Ying, Gu, Xiao-guang, Huang, LuYear:
2015
Language:
english
DOI:
10.1109/iciicii.2015.121
File:
PDF, 179 KB
english, 2015