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[IEEE 2016 International Conference on Microelectronic Test Structures (ICMTS) - Yokohama, Japan (2016.3.28-2016.3.31)] 2016 International Conference on Microelectronic Test Structures (ICMTS) - Test structures for the characterisation of conductive carbon produced from photoresist
Scarfi, S., Smith, S., Tabasnikov, A., Schmuser, I., Blair, E., Bunting, A.S., Walton, A.J., Murray, A.F., Terry, J.G.Year:
2016
Language:
english
DOI:
10.1109/icmts.2016.7476204
File:
PDF, 23.18 MB
english, 2016