[IEEE 7th International Conference on Solid-State and...

  • Main
  • [IEEE 7th International Conference on...

[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Fabrication and characterization of 1.5fF/um/sup 2/ high-performance low-cost metal-insulator-metal capacitor in 0.13um and below Cu 4 BEOL technologies

Chen, Z., Lin, K.M., Kuo, C.C., Lin, Y.F., Huang, J.C., Su, T.C., Wang, J.P., Liao, C.C., Han, Q.H., Bei, D.H., Ang, T.C., Jeng, M.C.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
1
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1434987
File:
PDF, 987 KB
english, 2004
Conversion to is in progress
Conversion to is failed