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[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Fabrication and characterization of 1.5fF/um/sup 2/ high-performance low-cost metal-insulator-metal capacitor in 0.13um and below Cu 4 BEOL technologies
Chen, Z., Lin, K.M., Kuo, C.C., Lin, Y.F., Huang, J.C., Su, T.C., Wang, J.P., Liao, C.C., Han, Q.H., Bei, D.H., Ang, T.C., Jeng, M.C.Volume:
1
Year:
2004
Language:
english
DOI:
10.1109/icsict.2004.1434987
File:
PDF, 987 KB
english, 2004