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[IEEE 2015 15th International Workshop on Junction Technology (IWJT) - Kyoto, Japan (2015.6.11-2015.6.12)] 2015 15th International Workshop on Junction Technology (IWJT) - P, Sb and Sn ion implantation with laser melt-LPC (liquid phase crystallization) for high activation n+ ultra shallow junction in Ge epilayer and surface strain-Ge formation for mobility enhancement
Borland, John, Herman, Joshua, Novak, Steve, Onoda, Hiroshi, Nakashima, Yoshiki, Huet, Karim, Johnson, Walt, Joshi, AbhijeetYear:
2015
Language:
english
DOI:
10.1109/iwjt.2015.7467065
File:
PDF, 2.44 MB
english, 2015