SPIE Proceedings [SPIE Photomask Japan '94 - Kawasaki City, Kanagawa, Japan (Friday 22 April 1994)] Photomask and X-Ray Mask Technology - New mask optimization methodology using exposure-defocus and mask fabrication latitude
Tsudaka, Keisuke, Sugawara, Minoru, Kawahira, Hiroichi, Ogura, Akihiro, Nozawa, Satoru, Yoshihara, HideoVolume:
2254
Year:
1994
Language:
english
DOI:
10.1117/12.191933
File:
PDF, 525 KB
english, 1994