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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 17 August 2014)] Interferometry XVII: Techniques and Analysis - Measure of a zinc oxide (ZnO) film thickness using a point diffraction interferometer
Creath, Katherine, Burke, Jan, Schmit, Joanna, Rueda-Soriano, Esteban, Gómez-Pozos, Heberto, González-Vidal, José L., Muñoz Potosi, A., Valdivieso-González, Luis G.Volume:
9203
Year:
2014
Language:
english
DOI:
10.1117/12.2062098
File:
PDF, 711 KB
english, 2014