SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] Optomechanical and Precision Instrument Design - Aspheric surface figuring of silicon using plasma-assisted chemical etching
Hoskins, Steven J., Scott, Bradley A., Hatheway, Alson E.Volume:
2542
Year:
1995
Language:
english
DOI:
10.1117/12.218670
File:
PDF, 455 KB
english, 1995