SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Micro-Optical Technologies for Measurement, Sensors, and Microsystems - New integrated optics displacement sensor in glass
Lang, Thiemo, Genon-Catalot, Denis, Dandrea, Pascal, Schanen Duport, Isabelle, Benech, Pierre, Parriaux, Olivier M.Volume:
2783
Year:
1996
Language:
english
DOI:
10.1117/12.248503
File:
PDF, 334 KB
english, 1996