SPIE Proceedings [SPIE ISMA '97 International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 23 June 1997)] Microlithographic Techniques in IC Fabrication - Lithography using a compact plasma focus electron source
Lee, Paul C. K., Feng, X., Zhang, Guan, Liu, Mahe, Lee, Sing, Yoon, Soon Fatt, Yu, Raymond, Mack, Chris A.Volume:
3183
Year:
1997
Language:
english
DOI:
10.1117/12.280538
File:
PDF, 2.65 MB
english, 1997