![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE ISMA '97 International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 23 June 1997)] Automatic Inspection and Novel Instrumentation - Phase-shifting interferometer for surface inspection
Tam, Siu Chung, Low, Beng-Yew, Chua, Hock-Chuan, Ho, Anthony T. S., Neo, Wah-Peng, Ho, Anthony T. S., Rao, Sreenivas, Cheng, Lee MingVolume:
3185
Year:
1997
DOI:
10.1117/12.284036
File:
PDF, 960 KB
1997