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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - New developments of process technologies for microfabrication
Piotter, Volker, Hanemann, Thomas, Ruprecht, Robert, Thies, Andreas, Hausselt, Juergen H., Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
Language:
english
DOI:
10.1117/12.284469
File:
PDF, 1.28 MB
english, 1997